Managing process integrity starts with the liquids that come in direct contact with the wafer. With ever-increasing miniaturization, the requirements for the purity of bulk chemicals as well as their supply systems are dramatic. Compared to pumps, pressurized vessels bear a water hammer risk that can cause particle release from filters and safety concerns. Among all pump systems for semiconductor manufacturing, Levitronix® pumps have become the industry standard for ultrapure wet applications as the absence of a mechanical bearing leads to virtually no particle generation.
Levitronix® pump systems are based on active magnetic levitation. There is no mechanical coupling between the impeller and the pump head casing, which leads to wear-free operation and, therefore, virtually no particle generation.
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In comparison to pumps, pressurized vessels are installed in a dead-headed system, which bears the risk of a water hammer. A water hammer can cause particle release from filters and safety concerns due to large hydraulic shocks. Levitronix® pumps allow for installation in a recirculation loop, which improves filter performance and maximizes safety.
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Installation of a Levitronix® pump in a recirculation system allows for multiple cycles through the filter and, therefore, increased purification. In comparison, in single filtration steps, as in pressurized vessel systems, a large part of contamination remains in the liquid.
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Application Brochure: Ultrapure and Safe Pumps for Bulk Chemical Delivery 
Learning Video: Henry's Law Bulk Chemical Delivery 
