The Levitronix® Bearingless Fan System BFS is designed for demanding applications in microelectronics manufacturing. Based on active magnetic levitation, the fan impeller is suspended and driven by the magnetic field of the motor. The wide gap between impeller and stator ensures that there is no wear and therefore virtually no particle generation, making it the purest fan. As the impeller and stator are completely encapsulated, the fan is extremely resistant against aggressive media and is rated for use in explosive atmospheres.
Robust against aggressive gases
As the impeller and stator are completely encapsulated, the fan is extremely resistant against aggressive media.
The purest fan within semiconductor manufacturing
Since there is no mechanical contact between the impeller and the fan head casing, there is no wear and therefore virtually no particle generation.
ATEX/ IECEx certified
The BFS is ATEX / IECEx certified and allows installation within an ATEX Zone 1 area for gas and ATEX Zone 21 for dust.
Up to 37 m3/min
The suspended impeller enables speeds up to 13’000 rpm, allowing the BFS to achieve extremely high flows.
Reduced particle build-up
There is no mechanical bearing, thus the risk of a fan failure is substantially reduced.
Significantly reduced footprint and cabling effort
The motor and pump controller are integrated into the driver housing, significantly reducing the footprint.
From a few cm3/min up to max flow
The BFS accurately controls and maintains flows from just a few cm3/min up to the maximum flow rate, giving them a very high flow resolution.
Increase your equipment uptime
There are no bearings to wear out or seals to break down, increasing equipment uptime, extending the life of your process equipment, and reducing maintenance costs.
Create a feedback loop
Integrate a flow or pressure sensor into your system to create a feedback loop that allows you to automatically maintain your desired process conditions.
High power density
The high power density of the BFS allows for a small footprint. Additionally, the magnetic bearing minimizes noise generation.