Increased Uniformity
and Yield in
Metal Plating


With ever-increasing miniaturization, the semiconductor plating industry is providing advanced IC packages to develop next-generation chip designs. To keep pace with technological improvements, pump systems must keep process precious plating solutions controlled, uniform, and with no particle generation. Compared to Levitronix® pumps, magdrive centrifugal pumps contain mechanical slide bearings, which clog and fail due to the solution’s precipitation. Levitronix® pump systems are based on active magnetic levitation, which results in a significantly extended equipment uptime and a reliable, pulsation-free, and consistent flow. The absence of a mechanical bearing ensures virtually no particle generation.

Levitronix® pump systems are designed for demanding plating applications where consistent, uniform, and ultrapure processing will ensure the highest yield.

Extendend Lifetime

No bearing failure

By eliminating a mechanical bearing, no mechanical friction occurs that could cause local hotspots. No narrow gaps exist where metal could precipitate. The low-shear, dead-zone-free pump design, and the smooth, wetted plastic surfaces further help avoid metal deposition in the pump, resulting in an increased lifetime.

Left: Levitronix® pump after one year of operation with gold sulfite solution. Right: Magdrive pump after one month of operation with gold sulfite solution.

Smallest Footprint

Substantially smaller than magdrive pumps

The pump and motor’s highly integrated design combined with the absence of a mechanical bearing results in a system that greatly reduces the space requirements and allows for installation in confined spaces.

Size comparison between Levitronix® BPS-3 and a Mag-Drive Pump 1.5 Bar, 70 Lpm

The Purest Pump

Ultralow particle generation

Levitronix® pump systems are based on active magnetic levitation. There is no mechanical coupling between the impeller and the pump head casing, which leads to wear-free operation and, therefore, virtually no particle generation.

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zoom particle-size-distribution-measured-downstream-of-the-pumps-at-5gpm-and-40-psig
Particle size distribution measured downstream of the pumps at 5gpm and 40 psig

Highest Reliability

MTBF > 100 years

There are no bearings to wear out or seals to break down. As a result, equipment uptime increases massively, extending the life of the process equipment and reducing maintenance costs.


Microelectronics Pumps

Ultrapure Bearingless Pump Systems


Microelectronics Flow Controllers

Ultrapure Bearingless Flow Controllers

Microelectronics Inline Flow Sensors

PFA Ultrasonic Inline Flow Sensors

Microelectronics Clamp-On Flow Sensors

Non-Invasive Ultrasonic Flow Sensors for PFA Tubing

Pressure Boosting System

Turnkey Pressure Boosting and Control

Microelectronics Fans

Chemical Resistant Bearingless Fans

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