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Ultrapure and Safe Pumps for Bulk Chemical Delivery

Managing process integrity starts with the liquids that come in direct contact with the wafer. With ever-increasing miniaturization, the requirements for the purity of bulk chemicals as well as their supply systems are dramatic.
Compared to pumps, pressurized vessels bear a water hammer risk that can cause particle release from filters and safety concerns. Among all pump systems for semiconductor manufacturing, Levitronix® pumps have become the industry standard for ultrapure wet applications as the absence of a mechanical bearing leads to virtually no particle generation.
Levitronix® pump systems are designed for demanding bulk chemical delivery applications where ultrapure and safe processing will ensure the highest yield.

Company Levitronix
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