LFS-50 Ultrasonic High-Precision Flow Measurement for Microelectronics Wet Applications

Flow Range 0 - 50 l/min
Accuracy ±1% of reading
Tube size (OD) ¾"
Wet material PFA
Fluid temp 10-90°C / 50-194°F

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The LEVIFLOW® LFS-50 inline sensor is designed for non-invasive high precision flow measurements of high purity fluids. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid. The wet material is made from PFA and resistant against harshest chemicals.

System Benefits

Non-invasive measurement
Since there are no moving parts, there is no wear and therefore virtually no particle generation.

Ideal for Ultrapure Fluids

High accuracy and repeatability of reading
10.6 – 50 lpm: ±1 % acc. and ±0.5 % rep.
0 – 10.6 lpm: ±0.106 lpm acc. and < 0.053 lpm rep.

High Precision Flow Measurement

Suitable for high volume applications
For high volume applications, multi-channel converters are available, which can process up to 6 sensors with one single converter. The sensor signals are available over an RS485 two-wire bus or a PLC interface, thereby reducing cabling, footprint, and cost.

6-Channel Converter for Multiple Sensors

Up to 180° C/ 356° F liquid temperature
A high-temperature version with increased thermal insulation allows accurate flow measurement of hot liquids.

High-Temperature Sensor Available

Smart digital signal processing
The flow converter uses a digital signal processor (DSP) to provide accurate flow measurement even when bubbles are present.

Improved Robustness against Bubbles

Smart sensor
Various parameters such as full scale, total volume, bubble detection, or high flow alarm are provided and can be configured with the Levitronix® Service Software.

Configurable Flow Sensor Parameters

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