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Leachout Test LEVIFLOW^® Flow Sensors according to Semi F40/F57

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Leachout Test LEVIFLOW^® Flow Sensors according to Semi F40/F57

Keywords:

Microelectronics
Flow Sensors
Particle Shedding

Facts
Exposure of the flow sensor’s wet surface to acid chemicals can result in leach out of trace metals. Trace metal contamination can cause alteration of electrical properties in semiconductor devices.

Test Conditions
The flow sensors LFS-20 and LFS-80 were filled with UPW. The levels of all metals, reactive silica, and anion impurities were measured in the used UPW.

Results
For both sensors, all measured levels were within the specification of Semi F40/F57.

Author M. Reutz, R. Braitmayer

Company ATU GmbH

Document Number 0910 066

Pages 3

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Leachout Test LEVIFLOW® Flow Sensors according to Semi F40/F57

Leachout Test LEVIFLOW^® Flow Sensors according to Semi F40/F57