BPS-600 Ultrapure Pump System for Microelectronics Wet Applications

Max flow 75 lpm / 20 gpm
Max diff. pressure 3.2 bar / 46psi
Max liquid Temp 90° C / 194° F
Wet material PFA, PTFE

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The Levitronix® BPS-600 is designed for ultrapure processing of delicate fluids in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down.
The impeller and casing are both made from chemical-resistant high purity fluoropolymer resins. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed.

Flow Pressure Curve
Flow Pressure Curve
System Benefits

Proven by industry experience – The purest pump within semiconductor manufacturing (and beyond)!
Since there is no mechanical coupling between the impeller and the pump head casing, there is no wear and therefore virtually no particle generation.

The Purest Pump

Significantly lower than air-operated pumps 
The wet surface area of a Levitronix® pump is several times smaller than that of a pneumatic pump of comparable hydraulic power.

Very Low Trace Metal Contamination

Ideal for Slurry and delicate plating liquids
The absence of mechanical bearings, narrow gaps, fissures, and dead zones combined with the smooth wetted plastic surfaces allow for the gentle processing of sensitive liquids.

Low Shear Design

Improved filter performance
The open pump head design, high flow resolution, centrifugal pump principle, and the absence of valves lead to a pulsation-free flow, thereby improving the performance of ultrapure filters.

Pulsation Free Flow

No more flow throttling – highly accurate flow and pressure
The Levitronix® pump allows for precise control of flow or pressure over a wide operating range due to its variable speed and high resolution.

High Controllability and Wide Flow Range

Extremely high reliability
There are no bearings to wear out or seals to break down, increasing equipment uptime, extending the life of your process equipment, and reducing maintenance costs.

Highest MTBF (>100 Years)

From a few mlpm up to max flow
BPS pumps accurately control and maintain a smooth flow from just a few mlpm up to the maximum flow rate, giving them the highest turndown ratio among competitive pumps.

Highest Turndown Ratio

Substantially smaller than air operated pumps
The highly integrated design of the pump and motor combined with the absence of a mechanical bearing greatly reduce the footprint and allow for installation in confined spaces.

Small Footprint

Smart Pumps for Smart Manufacturing
 BPS pumps allow for high-performance data acquisition that is ideal for predictive maintenance and factory wide system integration.

Constant Data Acquisition and Condition Monitoring

Substantially less noise than with pneumatic pumps
The magnetic coupling of the impeller and pump casing produces virtually no vibration resulting in an extremely quiet operation.

Low Noise and Low Vibration

Create a feedback loop
Integrate a flow or pressure sensor into your pump system and create a feedback loop to allow automatic control of your desired process conditions.

Integrated Flow Controller

More than 25 years experience
 Levitronix® pumps are firmly established in other highly demanding industries such as biopharmaceutical

Long History

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