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The Influence of Pumps on Surface Preparation

There is no experimental evidence on the effect of centrifugal and diaphragms pump on cleaning process performance in microelectronic processing industries. Thus in this present project, the focus is on the influence of pumps on surface preparation. The objectives and the methodologies of this present work have been set as follows:

    1. To study the effect of pumping methods (diaphragm vs. magnetic levitation pump) on cleaning and particles
    2. To investigate the fluid flow behavior in the tank with and without pulsation
Author Prof. Jin-Goo Park
Company Hanyang University
Pages 19