Chemical Mechanical Planarization (CMP) must continuously improve to meet the stringent requirements of next generation IC device manufacturing. Precision flow control of CMP slurry is critical to achieving a repeatable planarization process, minimizing slurry waste, and reducing cost-of-ownership (CoO). Monitoring and controlling slurry large particle concentration through filtration is also essential in maintaining slurry health during its lifecycle. This study reports data of slurry handling, filtration, and flow control using magnetically levitated centrifugal (MLC) pumps and air-operated double diaphragm (AOD) pumps. Results are presented for a point-of-use (POU) slurry delivery system feeding from a simulated global distribution loop.
Tests were performed using ~12.5 (Silica-I) and ~25 (Silica-II) weight percentage of solids silica abrasive oxide CMP slurries. Extensive handling tests of shear-sensitive silica slurries using an AOD pump generated significant number of large particle agglomerates. In similar tests, an MLC pump generated fewer large particles than an AOD pump for comparable turnovers. A filter of nominal rating 1.0 micron was used in the global loop for these tests. In comparison to similar AOD pumps, slurry recirculation tests using an MLC pump in five-hour recirculation tests (with one-micron pleated-depth-filter in the loop), show a much smaller increase in filter pressure-drop and minimal slurry loop pressure pulsation with time. This would suggest significantly enhanced filter lifetime for the MLC pump based slurry delivery systems handling shear sensitive silica slurries, as compared with the AOD pump systems.
Evaluation of a closed-loop flow-control system employing a pre-pressure regulator, an MLC pump, and a differential pressure based electronic flowmeter in the slip stream demonstrated good functionality and dispense flow consistency, and resulted in repeatable short-term and extended-period slurry dispense cycles over the tested flow range of 50 mL/min to 490 mL/min. This approach will provide significant benefits in advanced CMP processes by eliminating inconsistent slurry flow and particle contamination from peristaltic pump tubing, enhancing filter lifetime, increasing device yield, reducing the possibility of catastrophic failure, and minimizing downtime and labor costs due to frequent pump maintenance and replacement.
Necessary cookies are absolutely essential for the website to function properly. These cookies ensure basic functionalities and security features of the website, anonymously.
|cookielawinfo-checbox-analytics||11 months||This cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Analytics".|
|cookielawinfo-checbox-others||11 months||This cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Other.|
|cookielawinfo-checkbox-necessary||11 months||This cookie is set by GDPR Cookie Consent plugin. The cookies is used to store the user consent for the cookies in the category "Necessary".|
|cookielawinfo-checkbox-performance||11 months||This cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Performance".|
Functional cookies help to perform certain functionalities like sharing the content of the website on social media platforms, collect feedbacks, and other third-party features.
Performance cookies are used to understand and analyze the key performance indexes of the website which helps in delivering a better user experience for the visitors.
Analytical cookies are used to understand how visitors interact with the website. These cookies help provide information on metrics the number of visitors, bounce rate, traffic source, etc.
Advertisement cookies are used to provide visitors with relevant ads and marketing campaigns. These cookies track visitors across websites and collect information to provide customized ads.
Other uncategorized cookies are those that are being analyzed and have not been classified into a category as yet.