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Levitronix® Pump Systems for Semiconductor Manufacturing

The Levitronix® pump system is a revolutionary pump that has no bearings that wear out or seals that break. Based on the principle of magnetic levitation, the pump’s impeller is suspended, contact-free, inside a sealed casing and is driven by the magnetic field of the motor. The impeller and pump head casing are both fabricated from chemical-resistant, high purity fluorocarbon resins which together comprise the pump head. A continuous flow rate and pressure are precisely controlled by electronically regulating the impeller speed, which eliminates any pulsation. Thanks to the absence of a mechanical bearingand the self-contained pump head design, the risk of contamination is drastically reduced. The absence of narrow gaps between the impeller and pump head casing plus the low-shear pump design allow for gentle and smooth pumping of sensitive liquids.

Company Levitronix
Document Number Levitronix_Brochure_Semiconductor_Manufacturing_V05
Pages 16