LEVITRONIX User Conference 2013 and
29th European CMP Users Meeting Spring 2013
Overwhelming Success - LEVITRONIX User Conference 2013 and 29th European CMP Users Meeting Spring 2013 got outstanding feed-back
First time in Switzerland the response of audience and speakers to the conference was extremely positive. The LEVITRONIX User Conference Team have been delighted to welcome more than 100 attendees each of the conference days where more than 20 Speakers from 5 Nations presented their latest research results as well as the newest highly interesting real-world case studies . Conference papers are available for downloaded below.
We are already looking forward to welcome you to our next conference!
Yours Levitronix User Conference Team
Levitronix Conference Papers 2013 - Ultrapure
- 1_All presentations_LUC2013_Ultrapure Day.zip
- A.Rastegar_Particle challenges in spinspray cleaning tools.pdf
- B.Reimer_Application of a high temperature MagLev pump system.pdf
- C.Fischer_SOM-an environmental friendly Post ash etch photo resist strip method on SW clean tools.pdf
- C.Gottschalk_POU Deoxification for Advanced Cleaning.pdf
- C.Russo_Spray Solvent Tool Semitool System Levitronix Pumps Upgrade.pdf
- F.Goebel_Reducing of Scrap in...sses through Maglev Pumps.pdf
- G.Zwicker_Establishment of a Wet Users Group.pdf
- I.Eichinger_State-of-the-Art Wet Spray Technology.pdf
- K.Gottfried_Precise bulk silicon wet etching.pdf
- L.Fabry_Field Experiences of Modern CMP and Ultrapure Cleaning Equipment.pdf
- M.Kellerer_Product Portfolio for Thin Film Photovoltaic.pdf
- M.Litchy_Evaluation of Particle Shedding and Trace Metal Extraction from Centrifugal Pumps.pdf
- T.Kopp_Process impacts of chemistry preparation on DHF process.pdf
Levitronix Conference Papers 2013 - CMP
- 1_All presentations_LUC2013_CMP Day.zip.zip
- A.Philipossian_Aggressive diamond characterization and wear analysis during CMP.pdf
- B.Johl_Challenges of Large Particle Size Analysis in CMP Slurries.pdf
- C.Wacinski_Concentration Monitoring during blended of CMP Slurry.pdf
- D.Jeanjean_Impact of CMP Buffing Chemistry on Defects Level for Interconnections at CMOS 28nm.pdf
- K.Murai_In-Line Monitoring of Mean Particle Size.pdf
- P.Bridger_SDS Simulation for fumed silica based slurry.pdf
- P.Levy_Effective management of CMP distribution systems.pdf
- T.Hwang_Green Flipper Dual-Sided CMP conditioner.pdf
- U.Kuenzelmann_Morphological and Topological Effects during the CMP of Aluminium.pdf
- V.Balan_Tungsten CMP Working under Pressure.pdf
