Ultrasonic Non-invasive Flow Measurement


The LEVIFLOW® LFIF flowmeter is designed for non invasive flow measurements of high purity fluids.

Specifications of Sensors

System Benefits

  • No contamination due to non-invasive measurement

  • No moving parts - no particle generation

  • Straight through flow path with no corners and dead zones.

  • Easy configurable flow sensor parameters (PC software)

  • Improved signal stability (viscosity change and bubble robustness) compared to flowmeters like vortex types.

  • Simple and compact design with one connection cable.

  • Low pressure loss.

  • Excellent price/performance ratio.

Standard Configuration

The standard configuration of the LEVIFLOW® LFIF flowmeter consists of a flow sensor and an integrated converter with a digital signal processor (DSP) for processing the sensor signals.

The compact integration of flow-sensor and converter reduces cabling effort and setup significantly.

An analog and digital output is provided and can be configured with a PC software. A two wire RS485 bus allows communication and configuration with a PC.


  • Flow monitoring of high purity liquid processes in Semiconductor manufacturing.

  • CMP slurry flow measurement.
  • Flow measurement in chemical manufacturing.
  • Flow control in combination with Levitronix MagLev pump systems.
  • Flow switch applications.

Operating Principle of Ultrasonic Integrated Flowmeter