Dynamic Flow Control Systems
Closed Loop Flow Control
Levitronix' pump controllers achieve closed-loop flow control without the need of additional controller hardware. To facilitate matters, Levitronix' provides either turnkey solutions for closed-loop flow control or helps to integrate your own flow-probe with a Levitronix pump system. Turnkey solutions have been developed and tested for flows as low as 3 mLpm (resolution 0.1 mLpm) up to 80 Lpm (scale-up to 280Lpm possible).
Experience has been gained with fluids such as CMP slurries, surface-conditioning chemicals, plating solutions and solvents. A block-diagram for a typical system with an external ultrasonic flow meter is shown on the right.