Product Declaration

Declaration of CE Conformity for BPS-1.pdf (71.0 kB)

Declaration of CE Conformity for BPS-3.pdf (70.5 kB)

Declaration of CE Conformity for BPS-4.pdf (71.5 kB)

Declaration of CE Conformity for BPS-200.pdf (73.0 kB)

Declaration of CE Conformity for BPS-600.pdf (50.5 kB)

Declaration of CE Conformity for BPS-4000.pdf (40.5 kB)

LPS-600 ATEX Conformity Statement SEV 09 ATEX 0114 e.pdf (1.2 MB)

LPS-600 ATEX Konformitaets Erklaerung SEV 09 ATEX 0114 d.pdf (1.3 MB)

LPS-4000 ATEX Conformity Statement SEV 10 ATEX 0131.pdf (360.9 kB)

UL File E256759 Cover Sheet.pdf (29.5 kB)

UL File E301519 Cover Sheet.pdf (29.3 kB)

Test Reports Ultrapure

An Evaluation of Particle Shedding from a New Levitronix BPS-3 Pump during the Initial Flush with ultrapure Water.pdf (40.0 kB)

Comparison of Particle Shedding from Ten Different Pumps in Water.pdf (298.5 kB)

Effect of Pressure and Flow Pulsations on Filter Retention.pdf (247.0 kB)

Leaching Test according to SEMI F40.pdf.pdf (192.1 kB)

Leachout Test LEVIFLOW ATU.pdf (348.9 kB)

Leachout Test LEVIFLOW EMPA.pdf (62.7 kB)

Trace Metal Dynamic Extraction from Five Pumps in Hydrochloric Acid.pdf (214.9 kB)

Trace Metal Dynamic Extraction from Three Centrifugal Pumps in Hydrochloric Acid.pdf (199.8 kB)

Trace Metal Extraction in Ultrapure Water.pdf (144.1 kB)

Test Reports CMP

Comparison of Four Pump Systems on the Particle Size Distribution of Cabot EP-C6618 Slurry.pdf (219.7 kB)

Comparison of Four Pump Systems on the Particle Size Distribution of Cabot iCue 600Y75 Slurry.pdf (228.3 kB)

Comparison of Four Pump Systems on the Particle Size Distribution of Cabot SiLECT 6000 Slurry.pdf (215.8 kB)

Comparison of Three Pump Systems on the Particle Size Distribution of Cabot Semi-Sperse 12 Slurry.pdf (145.8 kB)

Comparison of Three Pump Systems on the Particle Size Distribution of Cabot WIN W7300-A18 Slurry.pdf (214.1 kB)

Effect of a Levitronix BPS-4 Pump System on the Particle size Distribution of a Hitachi HS-8005-D4 Slurry.pdf (200.1 kB)

Effect of Levitronix BPS-200 and BPS-600 Pump Systems on the Particle Size Distribution of Cabot Semi-Sperse® 12 Slurry.pdf (302.6 kB)

Phase II Comparison of Filter Lifetime during Circulation of Cabot Semi Sperse 12 Slurry with 3 Types of Pumps.pdf (274.5 kB)