Technical Papers Product Specific

Centrifugal Pump without Bearings or Seals_EDT.pdf (1.1 MB)

Frei schwebend - Spaltrohrmotorpumpe foerdert ohne Lager und ohne Dichtung.pdf (652.5 kB)

Technical Papers Ultrapure

An Evaluation of Particle Shedding from a New Levitronix BPS-3 Pump during Flush-up with UPW.pdf (40.0 kB)

Effect of Pump Pulsation and Particle Loading on Membrane Filter Retention.pdf (168.6 kB)

Evaluation of particle shedding & trace Metal Extraction in high purity pumps.pdf (635.6 kB)

Levitronix BPS-4 Bearingless Pump System Operated in Hydrogen Peroxide.pdf (721.9 kB)

Random yield loss during wafer cleaning.pdf (3.0 MB)

The Influence of Pumps on Surface Preparation.pdf (1.2 MB)

Technical Papers CMP

Effect of a Maglev Centrifugal Pump on Slurry Health and Defect Rates.pdf (316.5 kB)

Effect of Particle Size Distribution on Filter Lifetime in Three Slurry Pump Systems.pdf (132.5 kB)

Effect of pump-induced particle agglomaration on CMP.pdf (785.1 kB)

Effect of pump type on the health of various CMP slurries.pdf (867.3 kB)

Effect of Shear Stress and Pump Methods on CMP Slurry.pdf (3.8 MB)

Effects of Fluid Handling Components on Slurry Health.pdf (367.9 kB)

Effects of Shear and Cavitation on Particle Agglomaration during handling of CMP Slurries containing Silica, Alumina, and Ceria Particles.pdf (330.8 kB)

How Pump-Induced Particles Affect Low-k CMP Defectivity.pdf (1.6 MB)

Particle Agglomeration Mechanisms in CMP Slurries.pdf (240.0 kB)

Precision Flow Control and Enhanced Filter Life Time in Magnetically Levitated Pump Based CMP Slurry Delivery.pdf (146.8 kB)

Slurry Pump Affects on CMP.pdf (109.9 kB)

Technical Papers Life Science

Investigation on mechanical stress on single use pumps.pdf (672.6 kB)