Leviboost™ Pressure Booster Kit
Higher Cost Pressure and More Rigid Specifications
In the Microelectronic world pressure variations in UPW, DI-Water and Chemical supply lines can be a problem for tools and processes. More and more, sophisticated manufacturing require a highly constant inlet pressure in order to keep the sensitive internal tool operations within the expected process window. As a result, any pressure fluctuations could possibly reduce process yields.
Based on continuously increasing cost pressure however, media supply systems are often designed at their limits. Further tool expansions often lead to unstable water supply situation. As a result, uncontrolled pressure fluctuations could cause extended cycle time, process interruptions, or even tool shut-downs. Major cost impacts are the consequence.