Semiconductor Products

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Application Specific Test Reports English Slurry Testing BPS-1 220 kB Slurry Testing BPS-3 175 kB Slurry Pump Comparison with BPS-4 142 kB Filter Lifetime Comparison of Pumps with BPS-4 316 kB Effect of Pump Pulsation on Filter Retention 145 kB Effect of Pressure and Flow Pulsations on Filter Retention 241 kB Foaming Effects of Levitronix’s Pump 40 kB Comparison of Four Pump Systems on the Particle Size Distribution of Cabot EP-C6618 Slurry 214 kB Comparison of Four Pump Systems on the Particle Size Distribution of Cabot iCue 600Y75 Slurry 222 kB CMP Pump Comparison with Cabot SiLECT 6000 210 kB CMP Trace Metal Extraction from 5 Pumps LTX 977B 1979 208 kB CMP Particle shedding from 10 different pumps LTX 1106 2034_1 291 kB