Semiconductor Products

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Publications and Papers English German The effect of HCl permeation through PFA on expected component life FabTech 37th Issue June 2008 3780 kB   Automatic Viscosity-Controlled Production of Photoresist 209 kB   Effect of Shear Stress and the Influence of Different Pump Methods on CMP Slurry Semiconductor International November 2004 143 kB   Effect of a Maglev Centrifugal Pump on Slurry Health and Defect Rates 309 kB   Effect of Pump Pulsation and Particle Loading on Membrane Filter Retention 164 kB   Centrifugal pump without bearings or seals World Pumps June 2002 1119 kB   Process 1202   637 kB Effect of Particle Size Distribution on Filter Lifetime in Three Slurry Pump Systems Presentation 175 kB   Effect of Particle Size Distribution on Filter Lifetime in Three Slurry Pump Systems Paper 129 kB   Flow Control and Enhanced Filter Life Time in CMP Slurry Delivery Systems 143 kB   Effect of Shear and Cavitation on Different CMP Slurries 323 kB   Effect of Pump Type on the Health of Various CMP Slurries FabTech 33rd Issue March 2007 278 kB   Effect of pump induced particle agglomeration on chemical mechanical polishing (CMP) for computer hard drive industry SST August 2008 687 kB